%0 Journal Article
%T THE EFFECT OF CRYSTALLIZATION ON HYDROGEN CONTENTS AND BONDING STRUCTURE OF A-Si:H FILMS<br>晶化对A-Si:H膜中氢含量及键合形式的作用
%A HE YU-LIANG
%A YAN YONG-HONG
%A <br>何宇亮
%A 颜永红
%J 物理学报
%D 1984
%I 
%X This paper presents the dependence of the hydrogen contents and the Si-H bonding structure on crystallization in a-Si: H films. The hydrogen contents decreases dramatically and the bonding from transforms from Si-H to Si-H2 obviously when the grain size increases to about 200±50?. We suggest that the 200±50? is a phase transition point corresponds to transformation from mirco-crystalline-Si: H to poly- crystalline-like modification.
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=0FB5040FE4D87A773CAAF9D1D2D8C20F&yid=36250D1D6BDC99BD&vid=27746BCEEE58E9DC&iid=F3090AE9B60B7ED1&sid=C62A2B4ABB9EF7A3&eid=DCB1FFC992CAE3A0&journal_id=1000-3290&journal_name=物理学报&referenced_num=5&reference_num=0