%0 Journal Article
%T On the Creep Properties of Nano-particle Reinforced Nickel-matrix Composites of MEMS Microstructures<br>纳米颗粒增强镍基MEMS器件材料的蠕变性能研究
%A LU Ting-ting
%A WANG Feng-hui
%A CHEN Ping-wei
%A <br>鲁婷婷
%A 王峰会
%A 陈平伟
%J 实验力学
%D 2011
%I 
%X Structure material of MEMS was combined with nano-oxide particles by synchrotron radiation LIGA microcasting technics. The strength of Al2O3 nano-particle reinforced nickel-matrix composite is 1GPa, which is measured by Microtester with special fixture. Creep rate sensitivity index m of the composite at room temperature was measured by nanoindentation creep test combining the constant loading rate/load and the constant load test. Results show that nano-particle reinforced composite fabricated by LIGA process has high strength; material of MEMS microstructure presents creep behavior at room temperature; the maximum load at indentation depth of 1500nm is independent on loading rate, little viscoelastic and viscoplastic deformation took place during loading process; the indentation creep occurred due to the local high stress underneath the indenter; the average value of m is 0.004, which indicates that Al2O3 nano-particle has effectively reinforced the composite creep-resistating capacity. It is also found that the values of m obtained by different constants P·/P are basically identical, which indicates the insensitivity to loading conditions of this material.
%K MEMS (Micro-electromechanical Systems)
%K creep rate sensitivity index
%K nanoindentation
%K LIGA(German: Lithographie Galvanoformung Abformung
%K English: Lithography Electroforming Micro Molding)<br>MEMS（微机电系统）
%K 蠕变速率敏感指数
%K 纳米压痕
%K LIGA（光刻电铸模造）
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=49067A0A0D864088C06A84AACB51A5B2&aid=DDF2C1622A0C6D8078B5CD8F4413AC5A&yid=9377ED8094509821&vid=96C778EE049EE47D&iid=0B39A22176CE99FB&sid=2F56B21F91C9B05B&eid=6DE26652A1045643&journal_id=1001-4888&journal_name=实验力学&referenced_num=0&reference_num=20