%0 Journal Article
%T Thickness dependence of the properties of transparent conducting ZnO:Zr films deposited on flexible substrates by RF magnetron sputtering<br>厚度对柔性衬底上制备的ZnO:Zr透明导电薄膜性能的影响
%A Zhang Huafu
%A Lei Chengxin
%A Liu Hanfa
%A Yuan Changkun
%A <br>张化福
%A 类成新
%A 刘汉法
%A 袁长坤
%J 半导体学报
%D 2009
%I 
%X Transparent conducting zirconium-doped zinc oxide (ZnO:Zr) thin films with high transparency, low resistivity and good adhesion were successfully prepared on water-cooled flexible substrates (polyethylene glycol terephthalate, PET) by RF magnetron sputtering. The structural, electrical and optical properties of the films were studied for different thicknesses in detail. X-ray diffraction (XRD) and scanning electron microscopy (SEM) revealed that all the deposited films are polycrystalline with a hexagonal structure and a preferred orientation perpendicular to the substrate. The lowest resistivity achieved is 1.55E-3?·cm for a thickness of 189 nm with a Hall mobility of 17.6 cm2/(V·s) and a carrier concentration of 2.15E20cm-3. All the films present a high transmittance of above 90% in the wavelength range of the visible spectrum.
%K zirconium-doped zinc oxide thin films
%K flexible substrates
%K magnetron sputtering
%K transparent conduct- ing films<br>ZnO:Zr薄膜
%K 柔性衬底
%K 磁控溅射
%K 透明导电薄膜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=FB28D03E78ED8ED2E38BC21A8A48624B&yid=DE12191FBD62783C&vid=340AC2BF8E7AB4FD&iid=E158A972A605785F&sid=E33F0C674B4928B4&eid=E158A972A605785F&journal_id=1674-4926&journal_name=半导体学报&referenced_num=1&reference_num=0