%0 Journal Article
%T Properties of CdTe nanocrystalline thin films grown on different substrates by low temperature sputtering<br>不同衬底上纳米晶CdTe薄膜的低温制备及光性能研究
%A Chen Huimin
%A Guo Fuqiang
%A Zhang Baohua
%A <br>陈惠敏
%A 郭福强
%A 张保花
%J 半导体学报
%D 2009
%I 
%X CdTe nanocrystalline thin films have been prepared on glass, Si and Al2O3 substrates by radio-frequency magnetron sputtering at liquid nitrogen temperature. The crystal structure and morphology of the films were charac-terized by X-ray diffraction (XRD) and field-emission scanning electron microscopy (FESEM). The XRD examina-tions revealed that CdTe films on glass and Si had a better crystal quality and higher preferential orientation along the (111) plane than the Al2O3. FESEM observations revealed a continuous and dense morphology of CdTe films on glass and Si substrates. Optical properties of nanocrystalline CdTe films deposited on glass substrates for different deposited times were studied.
%K CdTe
%K thin films
%K RF magnetron sputtering
%K crystal structure
%K X-ray diffraction
%K optical properties<br>CdTe、薄膜、R.F磁控溅射、晶体结构、X射线衍射、光学性能
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=2D09D181BEE90D18F06E7D5A52284432&yid=DE12191FBD62783C&vid=340AC2BF8E7AB4FD&iid=94C357A881DFC066&sid=4E75EA5EA06BF9D8&eid=E158A972A605785F&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=18