%0 Journal Article
%T Improved light extraction in AlGaInP-based LEDs using a self-assembly metal nanomask<br>自制纳米金属掩模对AlGaInPLED光提取效率的改进
%A Jiang Wenjing
%A Xu Chen
%A Shen Guangdi
%A Fang Rong
%A Gao Wei
%A <br>蒋文静
%A 徐晨
%A 沈光地
%A 方瑢
%A 高伟
%J 半导体学报
%D 2010
%I 
%X In conventional light-emitting diodes (LED’s), the external efficiency is limited by total internal reflection at the semiconductor-air interface. An LED with a textured top surface can increase the light-extraction efficiency. This paper reports a new method to fabricate AlGaInP-based nanorod light emitting diodes (LEDs) by using self-assemble metal layer nano-masks and inductively coupled plasma (ICP). Light power measurements indicates that the scattering of photons considerably enhance the probability of escaping from the nanorod LEDs. The light-intensity of the nanorod LED is increased by 34% for a thin GaP window layer, and by 17% for 8 μm GaP window layer. The light power of the nanorod LED is increased by 25% and 13%, respectively.
%K AlGaInP-LED
%K nano-mask
%K light power<br>纳米金属掩模，快速退火，光提取效率，感应耦合等离子刻蚀
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=077EEBE13880DA087A18351481B36231&yid=140ECF96957D60B2&vid=4AD960B5AD2D111A&iid=B31275AF3241DB2D&sid=39D2F37E5B65C649&eid=38B194292C032A66&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=0