%0 Journal Article
%T Ti/WSi/Ni ohmic contact to n-type SiCN<br>
%A Cheng Wenjuan
%A Qian Yanni
%A Ma Xueming
%A <br>
%J 半导体学报
%D 2010
%I 
%K SiCN
%K ohmic contact
%K electrical property<br>
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=5BFC353DBFA655613B33B290698F3D3B&yid=140ECF96957D60B2&vid=4AD960B5AD2D111A&iid=E158A972A605785F&sid=8BB3D261075B2D59&eid=38B194292C032A66&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=3