%0 Journal Article
%T 17×17 硅基聚合物信道箱形光谱阵列波导光栅的制备
%A 秦政坤
%A 贺飞
%A 刘春玲
%A 王立忠
%A 马春生
%J 半导体学报
%D 2010
%I 
%X Arrayed waveguide grating (AWG) is a key device in wavelength-division multiplexing (WDM) system, and the flat spectral response of the AWG device is required. In this paper, the RIE process has been improved. By using the steam- redissolution technique, the insertion loss and the crosstalk have been reduced. Experimental results show that the central wavelength is 1550.86nm, and 3-dB bandwidth is about 0.478 nm, insertion loss is 10.5 dB, crosstalk is about –22 dB. The insertion loss of an AWG device is reduced by about 3 dB for the central channel and 4.5 dB for the edge channels, and the crosstalk is reduced by 2.5 dB after the steam- redissolution.
%K 阵列波导光栅
%K 平坦化光谱响应
%K 蒸汽回溶
%K 3-dB
%K 带宽
%K 串扰
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=2B6E378FAACA91913F07B187B9C080BA&yid=140ECF96957D60B2&vid=4AD960B5AD2D111A&iid=DF92D298D3FF1E6E&sid=0F1EE0B695C42876&eid=38B194292C032A66&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=0