%0 Journal Article
%T Supercritical carbon dioxide process for releasing stuck cantilever beams<br>用于释放已粘连MEMS悬臂梁的超临界CO2释放工艺
%A Hui Yu
%A Gao Chaoqun
%A Wang Lei
%A Jing Yupeng
%A <br>惠瑜
%A 高超群
%A 王磊
%A 景玉鹏
%J 半导体学报
%D 2010
%I 
%X The multi-SCCO2 (supercritical carbon dioxide) release and dry process based on our specialized SCCO2 semiconductor process equipment is investigated and the releasing mechanism is discussed. The experiment results show that stuck cantilever beams were held up again under SCCO2 high pressure treatment and the repeatability of this process is nearly 100%.
%K SCCO2
%K sticking effect
%K release
%K cantilever beam
%K MEMS<br>超临界CO2，粘连，释放，悬臂梁，MEMS
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=2F749F6A88DEBF256F1064AD5EFC6D0A&yid=140ECF96957D60B2&vid=4AD960B5AD2D111A&iid=F3090AE9B60B7ED1&sid=AE59DB288169B2A8&eid=E158A972A605785F&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=0