%0 Journal Article
%T Experimental Study of Polarization Properties of Rough Surface
%J Electrical and Electronic Engineering
%@ 2162-8459
%D 2012
%I 
%R 10.5923/j.eee.20120206.10
%X Singularities in behaviour of ellipsometric angles via functions of incidence angle of light were revealed experimentally under investigating four types of the samples manufactured on two materials: on dielectric-quartz and on metal-aluminium. Surface roughness was simulated by creation of artificial relief using a two-dimension orthogonal grating (random phase mask). Quadratic ˇ°defectsˇ± in the line were subjected to stochastic law of distribution. The ˇ°defectsˇ± were produced by etching in depth up to 1 ¦Ěm and their sizes were equal to 25x25 ¦Ěm and 2.5x2.5 ¦Ěm on each of materials. The impact of sizes of artificial ˇ°defectsˇ± and their density upon polarization of reflected light was investigated by the multiple-angles-of-incidence ellipsometric measurements at wavelength 0.63¦Ěm. For the first time, a random phase mask was used for simulation of rough surface.
%K Roughness
%K Optical Properties
%K Ellipsometry
%U http://article.sapub.org/10.5923.j.eee.20120206.10.html