%0 Journal Article %T The Effect of Annealing on the Size and Morphology of Palladium Nanopaticles %J American Journal of Condensed Matter Physics %@ 2163-1123 %D 2012 %I %R 10.5923/j.ajcmp.20120203.04 %X Palladium(Pd) nanoparticles are produced by variety of methods. In this research, at first Pd nanoparticles were produced by electron beam coating method and then morphology of Pd nanoparticles were studied. Obtained coating can be used as active layer in hydrogen and hydrogen compounds sensors or in hydrogen storage applications. The characterization of the Pd film has been performed by various techniques such as XRD and SEM. The texture and morphology of the materials has been investigated by Atomic Force Microscopy(AFM). Results of different analyses on the Pd films show that the increasing of annealing temperature could increase the Pd nanoparticles size. %K Coating Deposition %K Metal Nanoparticle %K Thin Films %K Structure and Morphology %K XRD %K SEM %K AFM %U http://article.sapub.org/10.5923.j.ajcmp.20120203.04.html