%0 Journal Article
%T Theoretical study on the influence of residual stress on adhesion-induced instability in MEMS
%A ShiJi Wang
%A Xian Li
%A ZhengHan Chen
%J Chinese Science Bulletin
%@ 1861-9541
%D 2009
%I 
%R 10.1007/s11434-009-0379-9
%X Adhesion and residual stress play a critical role in the performance and reliability of MEMS. The influence of residual stress on the adhesion-induced instability in MEMS is examined within the framework of thin elastic plate theory. The results show that the adhesion-induced instability will be mitigated if the residual stress exists in certain component of MEMS. Moreover, we find that the influence is significant only when the residual stress is under a proper magnitude (¦Â 20).
%K adhesion
%K residual stress
%K adhesion-induced instability
%K MEMS
%U http://link.springer.com/article/10.1007/s11434-009-0379-9