%0 Journal Article
%T Metrolog¨ªa por fibra ¨®ptica para la detecci¨®n de peque£¿os desplazamientos
%A Duarte
%A Julio Enrique
%A Fern¨¢ndez Morales
%A Flavio Humberto
%A Moreno Sereno
%A Mauricio
%A Mora Almerich
%A Jos¨¦
%A Vicente Andr¨¦s
%A Miguel
%J Revista Facultad de Ingenier¨ªa Universidad de Antioquia
%D 2010
%I Scientific Electronic Library Online
%X this work presents a methodology to measure deflections in the range of microns in thermo-pneumatic silicon micomembranes. this method is based on the fiber optic interferometry, which was used to study the static behavior of a silicon membrane of 10 ¦Ìm in thickness, 5 ¦Ìm in side length and 300 ¦Ìm in bulk, which was glued to a glass slide. static behavior is defines as the membrane deflection measurement taking into account only its response to the infrared radiation energy that drives them.
%K interferometry
%K silicon micromenbrane
%K optical fiber.
%U http://www.scielo.org.co/scielo.php?script=sci_abstract&pid=S0120-62302010000600015&lng=en&nrm=iso&tlng=en