%0 Journal Article
%T On MEMS Reliability and Failure Mechanisms
%A Daniel J. Fonseca
%A Miguel Sequera
%J International Journal of Quality, Statistics, and Reliability
%D 2011
%I Hindawi Publishing Corporation
%R 10.1155/2011/820243
%X Microelectromechanical systems (MEMS) are a fast-growing field in microelectronics. MEMS are commonly used as actuators and sensors with a wide variety of applications in health care, automotives, and the military. The MEMS production cycle can be classified as three basic steps: (1) design process, (2) manufacturing process, and (3) operating cycle. Several studies have been conducted for steps (1) and (2); however, information regarding operational failure modes in MEMS is lacking. This paper discusses reliability in the context of MEMS functionality. It also presents a brief review of the most relevant failure mechanisms for MEMS.
%U http://www.hindawi.com/journals/ijqsr/2011/820243/