%0 Journal Article
%T Influence of Oxygen to Argon Ratio on the Structural and Morphological Properties of Nb-Doped SrTiO<sub>3</sub> Epitaxial Films Grown by Reactive Ion Beam Sputter Deposition
%A Gasidit Panomsuwan
%A Nagahiro Saito
%J Crystal Structure Theory and Applications
%P 34-38
%@ 2169-2505
%D 2013
%I Scientific Research Publishing
%R 10.4236/csta.2013.21005
%X Nb-doped SrTiO3 (STNO) films were grown on (001)-oriented LaAlO3 substrates by a reactive ion beam sputter deposition at various mixing ratios (OMRs) with a substrate temperature of 800oC. The STNO films exhibited good crystallinity with an epitaxial orientation as characterized by high-resolution X-ray diffraction, grazing-incidence X-ray diffraction, and in-plane pole figure analysis. A decrease of out-of-plane and in-plane lattice constants was observed with an increase of OMR. The surface morphology of the STNO films showed a very dense fine-grain structure. The root-mean-square roughness was found to be increased as the OMR increased. Moreover, the elemental compositions of the STNO films were examined by X-ray photoelectron spectroscopy.
%K Nb-Doped SrTiO<
%K sub>
%K 3<
%K /sub>
%K Epitaxial Films
%K Crystal Structure
%K Ion Beam Sputter Deposition
%U http://www.scirp.org/journal/PaperInformation.aspx?PaperID=29570