%0 Journal Article %T Influence of Oxygen to Argon Ratio on the Structural and Morphological Properties of Nb-Doped SrTiO<sub>3</sub> Epitaxial Films Grown by Reactive Ion Beam Sputter Deposition %A Gasidit Panomsuwan %A Nagahiro Saito %J Crystal Structure Theory and Applications %P 34-38 %@ 2169-2505 %D 2013 %I Scientific Research Publishing %R 10.4236/csta.2013.21005 %X Nb-doped SrTiO3 (STNO) films were grown on (001)-oriented LaAlO3 substrates by a reactive ion beam sputter deposition at various mixing ratios (OMRs) with a substrate temperature of 800oC. The STNO films exhibited good crystallinity with an epitaxial orientation as characterized by high-resolution X-ray diffraction, grazing-incidence X-ray diffraction, and in-plane pole figure analysis. A decrease of out-of-plane and in-plane lattice constants was observed with an increase of OMR. The surface morphology of the STNO films showed a very dense fine-grain structure. The root-mean-square roughness was found to be increased as the OMR increased. Moreover, the elemental compositions of the STNO films were examined by X-ray photoelectron spectroscopy. %K Nb-Doped SrTiO< %K sub> %K 3< %K /sub> %K Epitaxial Films %K Crystal Structure %K Ion Beam Sputter Deposition %U http://www.scirp.org/journal/PaperInformation.aspx?PaperID=29570