%0 Journal Article %T Investigation of nanoporous material under quasi-equilibrium conditions %A O.V. Yushchenko %A T.I. Zhylenko %J Condensed Matter Physics %D 2013 %I Institute for Condensed Matter Physics %X Based on the three parametric Lorenz system, a model was developed that permits to describe the behavior of the plasma-condensate system near phase equilibrium in a self-consistent way. Considering the effect of fluctuations of the growth surface temperature, the evolution equation and the corresponding Fokker-Planck equation were obtained. The phase diagram is built which determines the system parameters corresponding to the regime of the porous structure formation. %K self-organization %K supersaturation %K phase equilibrium %K condensation %K phase diagram %U http://dx.doi.org/10.5488/CMP.16.13605