%0 Journal Article
%T RF Magnetron Sputtering Aluminum Oxide Film for Surface Passivation on Crystalline Silicon Wafers
%A Siming Chen
%A Luping Tao
%A Libin Zeng
%A Ruijiang Hong
%J International Journal of Photoenergy
%D 2013
%I Hindawi Publishing Corporation
%R 10.1155/2013/792357
%U http://dx.doi.org/10.1155/2013/792357