%0 Journal Article %T 3D heterostructures and systems for novel MEMS/NEMS %A Victor Yakovlevich Prinz %A Vladimir Alexandrovich Seleznev %A Alexander Victorovich Prinz and Alexander Vladimirovich Kopylov %J Science and Technology of Advanced Materials %D 2009 %I Institute of Physics, National Institute for Materials Science %X In this review, we consider the application of solid micro- and nanostructures of various shapes as building blocks for micro-electro-mechanical or nano-electro-mechanical systems (MEMS/NEMS). We provide examples of practical applications of structures created by MEMS/NEMS fabrication. Novel devices are briefly described, such as a high-power electrostatic nanoactuator, a fast-response tubular anemometer for measuring gas and liquid flows, a nanoprinter, a nanosyringe and optical MEMS/NEMS. The prospects are described for achieving NEMS with tunable quantum properties. %K micro-electro-mechanical systems (MEMS) %K nano-electro-mechanical systems (NEMS) %K MEMS/NEMS heterostructures %U http://www.iop.org/EJ/abstract/1468-6996/10/3/034502