%0 Journal Article
%T Influence of laser beam¡¯s image-plane position on geometry of through-holes in percussion-drilled glass using excimer laser
%A Ales Babnik
%J Maejo International Journal of Science and Technology
%D 2013
%I Maejo University
%X We study the influence of a laser beam¡¯s image-plane position relative to the processed surface for the deep-hole, laser-microdrilling of soda-lime glass with an excimer 308-nm laser and mask-projection technique. It is demonstrated that the image-plane position has a significant influence on the hole¡¯s tapering and final depth. Holes with exit diameters up to 10 times smaller than the mask-image diameter are produced in the case of perforation during the appropriate process phase determined by the formation of the plasma plume.
%K laser processing
%K excimer laser
%K mask-projection technique
%K glass micro-drilling
%K hole geometry
%U http://www.mijst.mju.ac.th/vol7/48-59.pdf