%0 Journal Article
%T OPTICAL CHARACTERISTICS AND OPTIMUM DESIGN OF OPTRICAL EXICITED SELF-RESONANT POLYSILICON SENSOR
光激光拾自谐振传感器的光学特性及优化设计
%A Li Bingqian
%A Zhu Changchun
%A Liu Junhua
%A
李炳乾
%A 朱长纯
%A 刘君华
%J 光子学报
%D 2002
%I
%X Multilayer model is established for self-resonant polysilicon sensor.Then,the optical characteristics of the sensor are analyse by this model in theoretical,and the thickness of the microbeam and the high of the cavity is optimized.
%K Self-resonance
%K Fresnel coefficients matrix
%K Optronical excited
自谐振
%K 菲涅耳系数矩阵
%K 光电激励
%K 光激
%K 光拾
%K 光学特性
%K 优化设计
%K 传感器
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=BB21ED7A60D2A77A&yid=C3ACC247184A22C1&vid=4AD960B5AD2D111A&iid=CA4FD0336C81A37A&sid=9C65ADEB5990B252&eid=0D0D661F0B316AD5&journal_id=1004-4213&journal_name=光子学报&referenced_num=0&reference_num=7