%0 Journal Article %T OPTICAL CHARACTERISTICS AND OPTIMUM DESIGN OF OPTRICAL EXICITED SELF-RESONANT POLYSILICON SENSOR
光激光拾自谐振传感器的光学特性及优化设计 %A Li Bingqian %A Zhu Changchun %A Liu Junhua %A
李炳乾 %A 朱长纯 %A 刘君华 %J 光子学报 %D 2002 %I %X Multilayer model is established for self-resonant polysilicon sensor.Then,the optical characteristics of the sensor are analyse by this model in theoretical,and the thickness of the microbeam and the high of the cavity is optimized. %K Self-resonance %K Fresnel coefficients matrix %K Optronical excited
自谐振 %K 菲涅耳系数矩阵 %K 光电激励 %K 光激 %K 光拾 %K 光学特性 %K 优化设计 %K 传感器 %U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=BB21ED7A60D2A77A&yid=C3ACC247184A22C1&vid=4AD960B5AD2D111A&iid=CA4FD0336C81A37A&sid=9C65ADEB5990B252&eid=0D0D661F0B316AD5&journal_id=1004-4213&journal_name=光子学报&referenced_num=0&reference_num=7