%0 Journal Article
%T Influence of Ar/N2 Flow Rate on Structure and Property for TaN/NbN Multilayered Coatings
%A Xuehua ZHANG
%A Yuanbin KANG
%A Sipeng LIU
%A Qiang LI
%A Ying YANG
%A Xiangyun DENG
%A Dejun LI
%A <br>Xuehua
%A ZHANG
%A Yuanbin
%A KANG
%A Sipeng
%A LIU
%A Qiang
%A LI
%A Ying
%A YANG
%A Xiangyun
%A DENG
%A Dejun
%A LI
%J 材料科学技术学报
%D 2007
%I 
%X TaN/NbN multilayered coatings with nanoscale bilayer periods were synthesized at different Ar/N2 flow rates by RF (radio frequency) magnetron sputtering. XRD (X-ray diffraction) and Nano Indenter System were employed to investigate the influence of Ar/N2 flow rate (FAr:FN2) on microstructure and mechanical properties of the coatings. The low-angle XRD pattern indicated a well-defined composition modulation and layer structure of the multilayered coating. All multilayered coatings almost revealed higher hardness than the rule-of-mixtures value of monolithic TaN and NbN coatings. At FAr:FN2=10, the multilayered coating possessed desirable hardness, elastic modulus, internal stress, and fracture resistance, compared with ones synthesized at other Ar/N2 flow rates. The layered structure with strong mixture of TaN (110), (111), (200) and Nb2N (101)textures should be related to the enhanced mechanical properties.
%K RF magnetron sputtering
%K TaN/NbN multilayered coatings
%K Nanoscale<br>射频磁控管溅射
%K 竹碳/汽车音响多层涂料
%K 纳米技术
%K 机械性质
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=324DC3CAB22330DB19158AE0A9B7BFA5&aid=122FE93727B52559&yid=A732AF04DDA03BB3&vid=EA389574707BDED3&iid=E158A972A605785F&sid=FCACFF68346F8D4F&eid=1A033C02510EFBE6&journal_id=1005-0302&journal_name=材料科学技术学报&referenced_num=0&reference_num=22