%0 Journal Article
%T Design and Mechanical Characteristics of Novel MEMS Microneedles<br>新型MEMS微针设计及其力学性能
%A Sun Xiao
%A Jia Shuhai
%A Zhu Jun
%A Li Yigui
%A <br>孙潇
%A 贾书海
%A 朱军
%A 李以贵
%J 半导体学报
%D 2007
%I 
%X Three novel MEMS microneedles are designed and fabricated.Aiming at practical applications,the mechanical characteristics of the microneedles and process of fluid flowing through the microchannels are studied through both theoretical analysis and numerical simulation with the finite element method.The results show that the microneedles designed here are strong enough to guarantee safe injection through skin,and they are suitable for delivering drugs in micro-volumes.
%K MEMS
%K microneedle
%K drug delivery
%K finite element method<br>微电子机械系统
%K 微针
%K 药物传输
%K 有限元
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=2AFAA3AF2E29E3F1&yid=A732AF04DDA03BB3&vid=D3E34374A0D77D7F&iid=CA4FD0336C81A37A&sid=A63576421B012172&eid=8477411EEDB08A86&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=10