%0 Journal Article
%T A new atmospheric RF cold plasma source with microhollow cathode structure<br>一种新型微空阴极结构的大气压射频冷等离子体源
%A Qiu Liang
%A Meng Yue-Dong
%A Ren Zhao-Xing
%A Zhong Shao-Feng
%A <br>裘 亮
%A 孟月东
%A 任兆杏
%A 钟少锋
%J 物理学报
%D 2006
%I 
%X The configuration and mechanism of a microhollow cathode discharge (MHCD) is introduced in this paper. The focus is a new type of cold atmospheric large-area plasma source, the fused hollow cathode (FHC) plasma source based on radio frequency hollow cathodes. Through its applications and related research, we present the characteristics of the hollow cathode discharge and the factors on which its characteristics depend, such as the cathode material, gas specy, frequency, gas flow, pressure, inner diameter of cathode, and the like. Two other types of related MHCD systems are given in addition.
%K microhollow cathode discharge
%K atmospheric
%K cold plasma
%K radio frequency<br>微空阴极
%K 大气压
%K 冷等离子体
%K 射频
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=C4E39651AA71DCD5&yid=37904DC365DD7266&vid=E514EE58E0E50ECF&iid=708DD6B15D2464E8&sid=1797B4D775AD30B6&eid=FD951803ACC717B2&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=27