%0 Journal Article
%T Structure and electrical characteristics of Nb-doped SrTiO3 substrates
%A Yanhong Huang
%A Huibin L¨¹
%A Haizhong Guo
%A Lifeng Liu
%A Meng HE
%A Zhenghao Chen
%A Yueliang Zhou
%A Kun Zhao
%A Kuijuan Jin
%A Guozen Yang
%J Chinese Science Bulletin
%@ 1861-9541
%D 2006
%I 
%R 10.1007/s11434-006-2075-3
%X The studies on structure and electrical characteristic of Nb-doped SrTiO3 (SNTO) substrates by XRD, Hall measurements, R-T and SEM, show that the SNTO substrates with the same Nb-doping concentration have different electrical properties because of the nonuniformity of Nb-doping. The uniformly doped high-quality substrates are extremely important for fabricating multilayer structure and devices. In addition, the experimental results also provide us with SEM method to judge the uniformity of conducting material.
%K Nb-doped SrTiO3
%K laser molecular beam epitaxy
%K electrical properties
%K doping uniformity
%U http://link.springer.com/article/10.1007/s11434-006-2075-3