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For the purpose of motor fault
real-time monitoring, this research developed a nano-silicon ni- tride film based
magnetic field (MF) sensor, and applied this sensor in MF detection of two common faults. Through experiment, it turned out that arc discharge and slot discharge
occur in motor fault produce MF with certain laws. This result proved the feasibility
of the sensor and sensing method in MF analysis, and revealed possibility of a new
method in fault detection.