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Nanometric profiles of sputtered ultra-thin Pd layers with thicknesses in the range 1 - 10 nm were investigated by capturing the leaking evanescent light from optical waveguides. The Pd films were deposited by sputtering on glass substratesalso servingas light waveguides. Calibrating the thickness values for the ultra-thin Pd films obtained from the sputtering rate combined with the DELI estimation technique, gave detailed 1Dand 3D morphological nanometric profiles of the deposited layers.