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On MEMS Reliability and Failure Mechanisms  [PDF]
Daniel J. Fonseca,Miguel Sequera
International Journal of Quality, Statistics, and Reliability , 2011, DOI: 10.1155/2011/820243
Abstract: Microelectromechanical systems (MEMS) are a fast-growing field in microelectronics. MEMS are commonly used as actuators and sensors with a wide variety of applications in health care, automotives, and the military. The MEMS production cycle can be classified as three basic steps: (1) design process, (2) manufacturing process, and (3) operating cycle. Several studies have been conducted for steps (1) and (2); however, information regarding operational failure modes in MEMS is lacking. This paper discusses reliability in the context of MEMS functionality. It also presents a brief review of the most relevant failure mechanisms for MEMS.
On MEMS Reliability and Failure Mechanisms  [PDF]
Daniel J. Fonseca,Miguel Sequera
Journal of Quality and Reliability Engineering , 2011, DOI: 10.1155/2011/820243
Abstract: Microelectromechanical systems (MEMS) are a fast-growing field in microelectronics. MEMS are commonly used as actuators and sensors with a wide variety of applications in health care, automotives, and the military. The MEMS production cycle can be classified as three basic steps: (1) design process, (2) manufacturing process, and (3) operating cycle. Several studies have been conducted for steps (1) and (2); however, information regarding operational failure modes in MEMS is lacking. This paper discusses reliability in the context of MEMS functionality. It also presents a brief review of the most relevant failure mechanisms for MEMS. 1. Introduction Microelectromechanical systems (MEMS) are a relatively new and fast-growing field in microelectronics. MEMS are commonly used as actuators, sensors, and radio frequency and microfluidic components, as well as biocomposites, with a wide variety of applications in health care, automotive, and military industries. It is expected that the market for MEMS will grow to over $30B by 2050 [1]. The MEMS lifecycle can be divided into three basic steps: (1) the design process, (2) the manufacturing process, and (3) the operating cycle. Several research studies have been conducted for the design and manufacturing of MEMS; however, information regarding failure analysis for MEMS can still be considered in its infancy stage [2]. There is a need to develop new tools and methodologies to understand the behavior of MEMS devices for distinct applications and operation conditions. MEMS are extremely diverse and their failure modes can be unique under different conditions [3]. MEMS represent a technology that can be defined as miniaturized mechanical and electromechanical elements (i.e., devices and structures) that are made using the techniques of microfabrication. Dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters [4]. Likewise, the types of MEMS devices can vary from relatively simple structures having no moving elements, to extremely complex electromechanical systems with multiple moving elements under the control of integrated microelectronics. A main criterion of MEMS is that there are at least some elements having some sort of mechanical functionality, whether or not these elements can move [4]. MEMS are manufactured using batch fabrication techniques similar to those used for integrated circuits. Unprecedented levels of functionality, reliability, and sophistication can be placed on a small silicon chip at a relatively low cost
On the Casimir effect in the microelectromechanical systems MEMS  [PDF]
Janina Marciak-Kozlowska,Miroslaw Kozlowski
Physics , 2005,
Abstract: In this paper the thermal transport phenomena in MEMS are investigated. The thermal Klein-Gordon transport equation for nanoscale structures is formulated and solved. Key words: MEMS, Klein-Gordon equation, Casimir effect.
MEMS practice, from the lab to the telescope  [PDF]
Katie M. Morzinski,Andrew P. Norton,Julia Wilhelmson Evans,Layra Reza,Scott A. Severson,Daren Dillon,Marc Reinig,Donald T. Gavel,Steven Cornelissen,Bruce A. Macintosh,Claire E. Max
Physics , 2012, DOI: 10.1117/12.910964
Abstract: Micro-electro-mechanical systems (MEMS) technology can provide for deformable mirrors (DMs) with excellent performance within a favorable economy of scale. Large MEMS-based astronomical adaptive optics (AO) systems such as the Gemini Planet Imager are coming on-line soon. As MEMS DM end-users, we discuss our decade of practice with the micromirrors, from inspecting and characterizing devices to evaluating their performance in the lab. We also show MEMS wavefront correction on-sky with the "Villages" AO system on a 1-m telescope, including open-loop control and visible-light imaging. Our work demonstrates the maturity of MEMS technology for astronomical adaptive optics.
Summary of Research Status and Application of MEMS Accelerometers  [PDF]
Weimeng Niu, Liqing Fang, Lei Xu, Xu Li, Ruikun Huo, Deqing Guo, Ziyuan Qi
Journal of Computer and Communications (JCC) , 2018, DOI: 10.4236/jcc.2018.612021
Abstract:
The rapid development of MEMS technology has made MEMS accelerometers mature and the application range has been expanded. Many kinds of MEMS accelerometers are researched. According to the working principle of MEMS accelerometer, it can be divided into: piezoresistive, piezoelectric, capacitive, tunnel, resonant, electromagnetic, thermocouple, optical, inductive, etc. Due to its outstanding features in terms of size, quality, power consumption and reliability, MEMS sensors are used in military applications and where high environmental resistance is required. MEMS accelerometers are developing rapidly and have good application prospects. In order to make MEMS accelerometers more widely understood, the advantages of MEMS accelerometers are expounded. The research status of MEMS accelerometers is introduced, and MEMS are analyzed. The application of accelerometers in real-world environments, and the development trend of MEMS accelerometers in the future. More scholars will invest in MEMS accelerometer research, pursuing high performance, low power consumption, high precision, multi-function, and interaction. Strong MEMS accelerometers will be ubiquitous in the future.
Review on the Modeling of Electrostatic MEMS  [PDF]
Wan-Chun Chuang,Hsin-Li Lee,Pei-Zen Chang,Yuh-Chung Hu
Sensors , 2010, DOI: 10.3390/s100606149
Abstract: Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.
Stability Analysis of MEMS Gyroscope Dynamic Systems
M. Naser-Moghadasi,F. Setoudeh,S. A. Olamaei
Advanced Computational Techniques in Electromagnetics , 2013, DOI: 10.5899/2013/acte-00124
Abstract: In this paper, the existence of a common quadratic Lyapunov function for stability analysis of MEMS Gyroscope dynamic systems has been studied then a new method based on stochastic stability of MEMS Gyroscope system has been proposed.
Integrated RF MEMS/CMOS Devices  [PDF]
R. R. Mansour,S. Fouladi,M. Bakeri-Kassem
Computer Science , 2008,
Abstract: A maskless post-processing technique for CMOS chips is developed that enables the fabrication of RF MEMS parallel-plate capacitors with a high quality factor and a very compact size. Simulations and measured results are presented for several MEMS/CMOS capacitors. A 2-pole coupled line tunable bandpass filter with a center frequency of 9.5 GHz is designed, fabricated and tested. A tuning range of 17% is achieved using integrated variable MEMS/CMOS capacitors with a quality factor exceeding 20. The tunable filter occupies a chip area of 1.2 x 2.1 mm2.
Modelling methodology of MEMS structures based on Cosserat theory  [PDF]
Mustafa Calis,Omar Laghrouche,Marc Desmulliez
Computer Science , 2008,
Abstract: Modelling MEMS involves a variety of software tools that deal with the analysis of complex geometrical structures and the assessment of various interactions among different energy domains and components. Moreover, the MEMS market is growing very fast, but surprisingly, there is a paucity of modelling and simulation methodology for precise performance verification of MEMS products in the nonlinear regime. For that reason, an efficient and rapid modelling approach is proposed that meets the linear and nonlinear dynamic behaviour of MEMS systems.
MEMS微型燃料电池*  [PDF]
刘晓为,张博,张宇峰,张鹏
化学进展 , 2009,
Abstract: 随着微能源技术的迅速发展和市场需求的不断增大,基于微机电系统(microelectromechanicalsystems,MEMS)技术的微型燃料电池由于其巨大应用前景逐渐得到社会的更多关注。本文详细介绍了国外微型燃料电池的应用概况,简要论述了将MEMS技术应用于微型燃料电池制作的可行性以及MEMS微型燃料电池的类型特点,并结合关键组件极板和膜电极,系统地总结了近几年来MEMS微型燃料电池的研究进展和成果,最后分析了目前存在的问题和发展趋势以及我国大力发展MEMS微型燃料电池的迫切需求。
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