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镀膜锰铜计的压阻性能研究

DOI: 10.11858/gywlxb.1992.01.010, PP. 68-74

Keywords: 镀膜锰铜计,冲击应力,压阻系数

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Abstract:

用磁控阴极等离子体溅射技术在云母基底上制作镀膜锰铜压阻计。5~56GPa冲击应力的标定实验表明,该计的压阻性能稳定。压阻系数的拟合式为p(GPa)=-0.14+90.63(ΔR/R0)+10.81(ΔR/R0)2-7.64(ΔR/R0)3,式中R0为锰铜计初始电阻,ΔR为受压时的电阻变化值。

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