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阵列式薄膜锰铜计的动态压阻响应研究

DOI: 10.11858/gywlxb.2004.03.014, PP. 279-282

Keywords: 锰铜薄膜,压阻系数,阵列式,热处理

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Abstract:

利用直流磁控溅射薄膜工艺制备阵列式薄膜锰铜压阻计,以氧化铝作为基片和绝缘封装材料。在结构上,4个具有相同阻值的薄膜锰铜计在同一氧化铝基片上呈对称分布。51.72GPa压力下的动态加载实验表明,4个计的压阻一致性好,无高压旁路效应,验证了薄膜锰铜压阻计动态测试的准确性和可靠性。

References

[1]  Gupta Y M. Stress Measurements Using Piezoresistance Gauges: Modeling the Gauge as an Elastic-Plastic Inclusion [J]. J Appl Phys, 1983, 54: 6256-6266.
[2]  de Carli P S. Stress-Gage System for the Megabar Range [R]. Stanford Research Institute, 1974: 17-19.
[3]  Chi J C, Wu G D. Impact Loading Response of F4/203A MnCu Pressure Gauge [J]. Explosion and Shock Waves, 1983, 3(3): 75-80. (in Chinese)
[4]  池家春, 吴国栋. F4/203A型锰铜压力计对撞击载荷的响应 [J]. 爆炸与冲击, 1983, 3(3): 75-80.
[5]  Nakamura A, Mashimo T. Calibration Experiment of a Thin Maganin Gauge for Shock-Wave Measurement in Solid: Measurements of Shock-Stress History in Alumina [J]. Jpn J Appl Phys, 1993, 32: 4785-4790.
[6]  Teng L, Yang B C, Cui H L, et al. Improvement of Adhesion between Metallic Films and Substrates [J]. Electronic Components & Materials, 2003, 22(6): 41-44. (in Chinese)
[7]  滕林, 杨邦朝, 崔红玲, 等. 金属薄膜附着性的改进 [J]. 电子元件与材料, 2003, 22(6): 41-44.
[8]  Rosenberg Z, Yaziv D, Parton Y. Calibration of Foil-Like Manganin Gauges in Planar Shock Wave Experiments [J]. J Appl Phys, 1980, 51(7): 3702-3705.
[9]  Gupta S C , Gupta Y M. Experimental Measurements and Analysis of the Loading and Unloading Response of Longitudinal and Lateral Manganin Gauges Shocked to 90 kbar [J]. J Appl Phys, 1987, 62(7): 2603-2609.
[10]  Bernstein D, Keough D D. Piezoresistivity of Manganin [J]. J Appl Phys, 1964, 35(5): 1471-1474.
[11]  Handbook of Functional Materials and Its Application Edited by Group. Handbook of Functional Materials and Its Application [M]. Beijing: Mechanism Publishing Company, 1991: 167. (in Chinese)
[12]  《功能材料及其应用手册》编写组. 功能材料及其应用手册 [M]. 北京: 机械出版社, 1991: 167.

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