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光子学报  2009 

Fabrication of Germanium Inverse Opal Three-dimensional Photonic Crystal by LPCVD
低压化学气相沉积技术制备锗反蛋白石三维光子晶体

Keywords: Germanium inverse opal,Photonic crystal,Low pressure chemical vapour deposition,Solvent vaporization convection self-assembly
锗反蛋白石
,光子晶体,低压化学气相沉积,溶剂蒸发对流自组装

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Abstract:

Monodisperse silica microspheres were assembled into three-dimensional colloidal crystal template with long-ranged order by solvent vaporization convection self-assembly method.Low Pressure Chemical Vapour Deposition(LPCVD) method was used to fill the voids of silica colloidal crystals template with high refractive index material germanium,then silica colloidal crystals template was removed by an acid etching.Thus germanium three-dimensional inverse opal photonic crystal was obtained.The modality,component and structure of the resulted samples were characterized by scanning electron microscopy,X-ray diffraction and UV-VIS-NIR spectroscopy.Results show that germanium of high crystalline quality is homogeneously distributed inside the voids of silica template.The filling fraction of germanium can be controlled by changing the conditions of LPCVD.The samples have optic reflective apex and show the photonic band gap effects.The experiment optic capability is inosculated with the calculated one.

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