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Keywords: Self-resonance,Fresnel coefficients matrix,Optronical excited自谐振,菲涅耳系数矩阵,光电激励,光激,光拾,光学特性,优化设计,传感器
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Multilayer model is established for self-resonant polysilicon sensor.Then,the optical characteristics of the sensor are analyse by this model in theoretical,and the thickness of the microbeam and the high of the cavity is optimized.