All Title Author
Keywords Abstract


MICROSTRUCTURE AND OPTICAL PROPERTIES OF THE AIN FILMS DEPOSITED BY ION BEAM ENHANCED REACTIVE MAGNETRON SPUTTERING
离子束增强反应磁控溅射AIN膜的组织结构及光学特性

Keywords: thin films,AIN,magnetron sputtering
薄膜
,AlN,磁控溅射

Full-Text   Cite this paper   Add to My Lib

Abstract:

Microstructure,crystallography,electron structure and optical properties ofaluminum nitride film deposited by ion beam enhanced reactive magnetron sputtering were stu-died.The results show that the microstructure of the film is uniform and the grain size

Full-Text

comments powered by Disqus