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物理学报  2013 

Influence of working pressure on the state of H2/C4H8 glowing discharge plasma
工作压强对射频辉光放电H2/C4H8等离子状态的影响

Keywords: the glowing discharge technology,mass spectrometry diagnosis of plasma,pressure
辉光放电技术
,等离子体质谱诊断,工作压强

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Abstract:

The variations of the main positive ion components and their energies for the plasma of H2/C4H8 gas mixture under different working pressures are investigated using the glow discharge technique and plasma mass spectrometry diagnostic method, and the effects of work pressure on both the dissociation mechanism of the mixed gas H2/C4H8 and the forming process of the main positive are analyzed. The results show that both the intensity and energy of the C-H segment ions in H2/C4H8 plasma decrease with pressure increasing. The relative concentration of m/e 41(C3H5+) reaches a maximum when work pressure is 5 Pa. And when the pressure is 10 Pa, the relative concentration of m/e 39(C3H3+) is largest; when the pressures are 15 Pa and 20 Pa, the relative concentration of m/e 29 (C2H5+) is highest; when the pressure is 25 Pa, the relative concentration of m/e 57(C4H9+) is biggest. The component and its energy distribution of H2/C4H8 plasma are qualitatively analyzed. The results will serve as a reference to the optimization of parameters for glow plasma polymer coatings.

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