An X-ray microtomography system was used for inspecting and characterizing the packaging of
micro mixers of planar configuration. Two types of micro mixers were machined from acrylic
plate by means of precision milling, and four different packaging techniques were tested for
mixer assembly: adhesive bonding, plasma bonding, screw-bolting, and xurography with doublesided
tape. The interiors of the mixers were thoroughly examined by navigating the threedimensional
images generated by the micro CT system. It was found that plasma bonding did
not work well on acrylics. The boundaries between the acrylic plate and the plastic tape used in
tape bonding were almost indistinguishable in the X-ray images because the densities of these
two materials are very close. Of the different packaging techniques we tested tape bonding
provided good sealing without the drawback of glue or sealing materials smeared into the
mixing chamber or flow channels.
Neuser, E., Suppes, A., 2007 “NanoCT visualizing internal 3D structures with submicrometer resolution,” DIR 2007 – Internal Symposium on Digital Industrial Radiology and computed Tomography (June 25 – 27, 2007, Lyon, France), 18 pages.
Brunke, O., Neuber, D., Lehmann, D. K., 2007 “NanoCT: Visualizing of internal 3Dstructures with submicrometer resolution,” Materials Research Society Symposium Proceedings 990 Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics, pp. 325-331.
Greer, J., Sundberg, S. O., Wittwer, C. T., Gale, B. K., 2007 “Comparison of glass etching to xurography prototyping of microfluidic channels for DNA melting analysis,” J. Micromech Microeng. 17, pp. 2407-2413.
Qi, S., Liu, X., Ford, S., Barrows, J., Thomas, G., Kelly, K., McCandless, A., Lian, K.,Goettert, J., Soper, S. A., 2002 “Microfluidic devices fabricated in poly(methyl methacrylate) using hot-embossing with integrated sampling capillary and fiber optics for fluorescence detection,” Lab on a Chip 2-2, pp. 88-95.
Lin, C. L., Miller, J. D., 2001 “A new cone-beam X-ray microtomography facility for 3D analysis of multiphase materials,” 2nd World Congress on Industrial Process Tomography (Hanover, Germany, 29th – 31st August, 2001), pp. 98 – 109.