%0 Journal Article
%T Characteristics and Operation Conditions of a Closed-Field Unbalanced Dual Magnetrons Plasma Sputtering System
%A Bahaa T. Chiad
%A Mohammad K. Khalaf
%A Firas J. Kadhim
%A Oday A. Hammadi
%J Open Access Library Journal
%V 1
%N 4
%P 1-7
%@ 2333-9721
%D 2014
%I Open Access Library
%R 10.4236/oalib.1100650
%X <p class="MsoNormal">
	<span lang="EN-US">In this work, a home-made closed-field
unbalanced magnetron system for plasma sputtering purposes was constructed and
operated. The effect of magnetron was introduced by comparing the obtained
Paschen¡¯s curve in existence of magnetron with and without magnetron.
Characterization of Paschen¡¯s curve as well as discharge current with gas
pressure at different distances between the discharge electrodes was
introduced. Optimum conditions to operate such home-made system for sputtering
purpose were determined.</span>
</p>
%K Physical Vapor Deposition
%K Sputtering
%K Magnetron Sputtering
%K Paschen¡¯s Law
%U http://www.oalib.com/paper/3095709