containing gold nanoparticles were grown by magnetron radio frequency (rf) sputtering
technique under various deposition conditions. The structural and optical properties
of the composite films deposited at 400℃ substrate temperature were compared with
those deposited at room temperature. Effect of substrate temperature of AuNPs on
micro structural properties of the Au/SiO2 nanocomposite films, such
as size, dislocation density (δ), strain
(ε) and lattice distortion (LD) have been
investigated. The face-centered cubic crystalline structure of Au nanoparticles inclusion in the
amorphous silica dielectric matrix was confirmed using X-ray diffraction. The average
grain size of AuNPs has been found in the range of 0.56 - 0.60 nm
and 1.15 - 1.23 nm at 3 × 10﹣3 mbar and 2 × 10﹣3 mbar argon pressure respectively. The δ, ε, LD values change inversely with the
increasing of the substrate temperatures. These composites exhibit the optical features
of a semiconductor with direct band gap. The band gap energy of 3.85 eV and 4.1
eV achieved for gold nanoparticles when the substrate temperatures increases from
25℃ to 400℃. A peak wavelength of the surface plasmon resonance band absorption
(SPR) characteristic of gold nanoparticle was found around 500 nm for the sample
deposited at 2 × 10﹣3 mbar and at 400℃ substrate temperature.
Cite this paper
Belahmar, A. and Chouiyakh, A. (2017). Effect of Substrate Temperature on Structural and Optical Properties of Au/SiO2 Nanocomposite Films Prepared by RF Magnetron Sputtering. Open Access Library Journal, 4, e3810. doi: http://dx.doi.org/10.4236/oalib.1103810.
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