In this work, a home-made closed-field
unbalanced magnetron system for plasma sputtering purposes was constructed and
operated. The effect of magnetron was introduced by comparing the obtained
Paschen’s curve in existence of magnetron with and without magnetron.
Characterization of Paschen’s curve as well as discharge current with gas
pressure at different distances between the discharge electrodes was
introduced. Optimum conditions to operate such home-made system for sputtering
purpose were determined.
Cite this paper
Chiad, B. T. , Khalaf, M. K. , Kadhim, F. J. and Hammadi, O. A. (2014). Characteristics and Operation Conditions of a Closed-Field Unbalanced Dual Magnetrons Plasma Sputtering System. Open Access Library Journal, 1, e650. doi: http://dx.doi.org/10.4236/oalib.1100650.
McClanahan, E.D. and Laegreid, N. (1991) Production of Thin Films by Controlled Deposition of Sputtered Material. Topics in Applied Physics, 64, 339-377. http://dx.doi.org/10.1007/3540534288_21
Rademacher, D., Zickenrott, T. and Vergohl, M. (2013) Sputtering of Dielectric Single Layers by Metallic Mode Reactive Sputtering and Conventional Reactive Sputtering from Cylindrical Cathodes in a Sputter-Up Configuration. Thin Solid Films, 532, 98-105. http://dx.doi.org/10.1016/j.tsf.2012.11.101
Baek, J.-S. and Kim, Y.J. (2006) Cooling Effect Enhancement in Magnetron Sputtering System. 5th International Conference on CFD in the Process Industries CSIRO, Melbourne, 13-15 December 2006, 1-5.
Kelly, P.J. and Arnell, R.D. (2000) Magnetron Sputtering: A Review of Recent Developments and Applications. Vacuum, 56, 159-172. http://dx.doi.org/10.1016/S0042-207X(99)00189-X
Walkowicz, J., Zykov, A., Dudin, S. and Yakovin, S. (2006) ICP Enhanced Reactive Magnetron Sputtering System for Synthesis of Alumina Coatings. Tribologia, 6, 163-174.
Ashenford, D.E., Long, F., Hagston, W.E., Lunn, B. and Matthews, A. (1999) Experimental and Theoretical Studies of the Low-Temperature Growth of Chromia and Alumina. Surface and Coatings Technology, 116-119, 699-704. http://dx.doi.org/10.1016/S0257-8972(99)00181-4
Taherkhani, F. and Taherkhani, A. (2010) Surface Characterization of Through Cage Plasma Nitriding on the Surface Properties of Low Alloy Steel. Transaction B: Mechanical Engineering, 17, 253-263.
Bogaerts, A., Neyts, E., Gijbels, R. and van der Mullen, J. (2002) Gas Discharge Plasmas and Their Applications (Review). Spectrochimica Acta Part B, 57, 609-658. http://dx.doi.org/10.1016/S0584-8547(01)00406-2
Kotp, E.F. and Al-Ojeery, A.A. (2012) Studies the Effect of Magnetic Field on Argon Plasma Characteristics. Australian Journal of Basic and Applied Sciences, 6, 817-825.
Personick, S.D. (1971) Statistics of a General Class of Avalanche Detectors with Applications to Optical Communications. Bell System Technical Journal, 50, 3075-3095. http://dx.doi.org/10.1002/j.1538-7305.1971.tb01847.x
Wang, J.-C., Leoni, N., Birecki, H., Gila, O. and Kushner, M.J. (2013) Electron Current Extraction from Radio Frequency Excited Micro-Dielectric Barrier Discharges. Journal of Applied Physics, 113, Article ID: 033301.
Window, B. and Savvides, N. (1986) Charged Particle Fluxes from Planar Magnetron Sputtering Sources. Journal of Vacuum Science & Technology A, 4, 196. http://dx.doi.org/10.1116/1.573470
